| 摘要 |
PROBLEM TO BE SOLVED: To simplify waste water treatment and to omit an electric wiring operation by providing a flange part attached to a frame in the upper part of a fixed part for supporting a movable part and a sealing member between the frame and the flange part. SOLUTION: A robot 1 is provided with a movable part 20 for supporting a hand part 40 for holding a thin substrate, a fixed part 10 for supporting the movable part 20 to be raised/lowered and a driving means 80. In the upper part of the fixed part 10, a flange part 12 is provided so as to be attached to a frame 3, and to discharge water used at a machining stage, the frame 3 is provided with a pipe 59 communicated from the upper surface of the frame 3 to a floor side. A sealing member is disposed between the lower surface of the flange part 12 and the upper surface of the frame 3 and, by this sealing member, the waste water used at the machining state is prevented from being discharged to the lower surface side of the frame 3. Thus, waste water treatment is simplified and an electric wiring operation is omitted. |
