| 摘要 |
PROBLEM TO BE SOLVED: To obtain a release film suitable for adhering surface protection of an adhering sheet for wafer processing by providing a silicone resin coating on at least one side of a plastic film so that a silicon element strength of the silicone resin coating surface by a fluorescent X-ray method is a specified value. SOLUTION: A silicone resin coating is provided on at least one side of a plastic film, and a silicon element strength A (unit: kcps) of the silicone resin coating surface by a fluorescent X-ray method satisfies an expression 3<=A<=6 or 3.5<=A<=5. A solvent resistance friction increasing rate by toluene is 300% or lower of an initial value. The plastic film is at least one type selected from a polyethylene terephthalate, a polyethylene-2,6-naphthalate, a polyethylene-α,β- bis(2-chlorophenoxy)ethane-4,4'-dicarboxylate.
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