| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma treating device capable of efficiently separating and removing attachments adhered to the upper cover body of a treating vessel in a closed state in a plasma treating device. SOLUTION: This plasma treating device 200 composed of a treating vessel 4 composed of a vacuum chamber, an electrode part 26 disposed in the treating vessel 4 and a plasma generating means 6 disposed outside the treating vessel 4 and generating plasma in the treating vessel 4 for executing plasma treatment to a work W disposed on the electrode part 26 in the treating vessel 4 is moreover provided with an auxiliary plasma generating means 6' for cleaning deposits deposited on a window part 10 being the upper cover body passing energy from the plasma generating means 6 disposed on a part of the treating vessel 4 outside the treating vessel 4. |
