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发明名称
PLASMA TREATMENT DEVICE
摘要
申请公布号
KR100229247(B1)
申请公布日期
1999.11.01
申请号
KR19960017963
申请日期
1996.05.27
申请人
ANELVA CORPORATION
发明人
TAKAGI, KENICHI
分类号
H05H1/46;C23C16/50;C23C16/507;H01J37/32;(IPC1-7):H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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