DRIVE METHOD OF SEMICONDUCTOR CLEANING EQUIPMENT,申请号KR19970015213-传众专利搜索

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发明名称	DRIVE METHOD OF SEMICONDUCTOR CLEANING EQUIPMENT
摘要
申请公布号	KR100227836(B1)	申请公布日期	1999.11.01
申请号	KR19970015213	申请日期	1997.04.23
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	LEE, YOUNG-CHUL;KIM, KYUNG-SOO
分类号	H01L21/34;(IPC1-7):H01L21/34	主分类号	H01L21/34
代理机构		代理人
主权项
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