| 摘要 |
PURPOSE:To prevent adsorption of microparticles to a case, etc., by using a synthetic resin into which carbon fibers are incorporated as an external case and using a material which decreases the surface resistance thereof to suppress the static electricity to be electrified on the surface of the protective case. CONSTITUTION:The case 11 of the reticle protective case 13 which is mounted on a metallic bottom plate 12 and puts the external case on the plate 12 consists of the synthetic resin contg. the carbon fibers. The surface resistance value decreases sharply when the carbon fiber content in the synthetic resin such as polyacetal exceeds prescribed %. The static electricity to be electrified on the surface of the protective case is thereby suppressed in the case of using the carbon fiber-contg. synthetic resin as the external case. Adsorption of the microparticles of the case is eventually suppressed and the removal of the microparticles is facilitated. Redropping of the microparticles onto the reticle surface and the sticking thereof to the surface are thereby prevented. |
