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发明名称
PIPE PRESSURE SENSOR ASSEMBLY FOR AND LEAKAGE PREVENT SYSTEM FOR SEMICONDUCTOR MANUFACTURE APPARATUS
摘要
申请公布号
KR100227822(B1)
申请公布日期
1999.11.01
申请号
KR19960035551
申请日期
1996.08.26
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
PARK, CHEOL-KYU;PARK, KWANG-IL;HAN, YRONG-WHAN
分类号
H01L21/223;(IPC1-7):H01L21/223
主分类号
H01L21/223
代理机构
代理人
主权项
地址
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