| 摘要 |
PROBLEM TO BE SOLVED: To improve the optical coupling of an optical element such as an optical waveguide or a light emitting or light receiving element or the like formed on a substrate and an optical fiber supported on the substrate. SOLUTION: A GaAs V groove 7 is etched and formed by using etching liquid composed of a liquid mixture containing at least a citric acid solution and aqueous hydrogen peroxide less than 10 deg.C on a GaAs (100) substrate 1 and the optical fiber 9 is fixed, supported and optically coupled to a laser element 8 loaded on the GaAs substrate 1. The GaAs V groove 7 is the V groove surrounded by two 111} B surfaces. In this case, since etching is not stopped on a 111} A surface appearing at the end part of the V groove on the side of the laser element 8 and a vertical 110} surface is formed or etching is advanced deep while performing undercut, it does not become an obstacle for bringing the optical fiber 9 to the laser element 8 at the terminating part of the GaAs V groove 7 and this optical connector of high optical coupling efficiency is obtained. |
