STAGE EQUIPMENT, ALIGNER USING THE EQUIPMENT, AND DEVICE-MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To improve dynamic characteristics a vertical stage. SOLUTION: A Y-stage 20 retaining an X-stage 30 holding a wafer or the like is driven in the Y axis direction (vertical direction) by a Y linear motor 40. The Y-stage 20 is linked with a counter mass 61 for self-weight compensation by using a belt 62. The Y-stage 20 is coupled with the belt 62 via an actuator 70 such as a bellofram and an air cylinder. On the basis of position information of the X-stage 30, the actuator 70 is controlled. Thereby angular moment is corrected, and a load applied to a Y-guide 11 is reduced. Vibration propagating from the belt 62 to the Y-stage 20 is eliminated by using vibration removing property of the actuator 70.