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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH11297827(A)
申请公布日期
1999.10.29
申请号
JP19980101507
申请日期
1998.04.13
申请人
NEC KYUSHU LTD
发明人
YOSHIMORI MASANORI
分类号
H01L21/768;H01L21/316;H01L23/522;(IPC1-7):H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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