SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF,申请号JP19980104632-传众专利搜索

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发明名称	SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号	JPH11297850(A)	申请公布日期	1999.10.29
申请号	JP19980104632	申请日期	1998.04.15
申请人	HITACHI LTD	发明人	MEGURO SATOSHI
分类号	H01L21/8238;H01L27/092;(IPC1-7):H01L21/823	主分类号	H01L21/8238
代理机构		代理人
主权项
地址

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