| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of easily manufacturing a planar microlens of high accuracy at a low cost. SOLUTION: In this manufacturing method of a planar microlens, a silica- based glass substrate 1 is prepared and by irradiating the plural areas of the substrate with X-rays 4 so as to generate the microlens 5 in the respective plural areas, the refractive indexes of the plural areas are locally raised. Thus, the planar microlens is easily manufactured without the need of many complicated processes. Especially, an X-ray mask is repeatedly used for any number of times without the need of forming it for every glass substrate like a mask 21a. |
