| 摘要 |
<p>PROBLEM TO BE SOLVED: To simply eliminate interferences of high-degree reflections without changing the set-up for an angle of incidence and make a correct analysis, by providing a plurality of areas for extinguishing high-degree reflections of different degrees, making a periodic length constant over the whole of the areas, and moving the area where X rays enter in a direction in which aΓvalue changes. SOLUTION: A moving means 7 can move areas I, II, III of an X-ray spectroscopic element 1 where an X ray 14 enters in a direction S in which aΓvalue changes. When a primary X ray 12 is irradiated from an X-ray source 11 to a sample 13, the secondary X ray 14 generated from the sample 13 is made parallel by a solar slit 6. A part of the paralleled secondary X-ray 14 passes a slit 7, enters the X-ray spectroscopic element 1 and is split. An intensity of a fluorescent X ray 16 obtained by the splitting is detected by a detector 17 sequentially in a range of a predetermined angleθof incidence. Interfering lines of high-degree reflections can be eliminated simply by appropriately moving the area to which the X ray 14 is brought in without changing the setting for the angleθof incidence, so that a correct fluorescent X-ray analysis is achieved.</p> |
