| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate holding device of a structure, wherein, even in the case where a quadrangular substrate is used in the device, there is no difference in deflection between the central part of the substrate and the end parts thereof, and the accurate flatness of the substrate is obtained. SOLUTION: The open area in the center of an adsorption groove 3 corresponding to the outer peripheral part of a substrate 7 to be adsorbed is set wider than those of the end parts of the groove 3. In concrete terms, a quadrangular substrate holding part 2 for holding the peripheral part of the quadrangular substrate is provided. The groove 3 provided along the upper surface of the holding part 2 and an air suction means 5 for sucking and exhausting the air in the groove 3 are provided. The width of the groove 3 is formed wider in the central parts of the sides of the part 2 and is formed narrower in the corner parts of the sides of the part 2.</p> |
