| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve operability and to shorten the time for wafer alignment by deciding the coordinates of other two points on the circular outer periphery of a wafer and setting a point where perpendicular bisectors of sides formed by a fixed point and two points intersect as the center point. SOLUTION: One point on the circular outer periphery of a wafer 7 is set to be a fixed point C, and its coordinates are registered in advance. The coordinates of the other two points A and B on the circular outer periphery of the wafer 7 are decided, and the points A, B and C are set. The perpendicular bisectors of the two arbitrary sides of a triangle ABC inscribed to the circle of the wafer 7 are drawn. A point O where the perpendicular bisectors intersect is stage-moved as the center coordinate of the wafer 7 and plotting data is drawn. Thus, the processing time of wafer alignment can be shortened and operability can be improved, since the magnification used is set to be low (one arbitrary magnification from 300-1,000 magnification times is set).</p> |
