| 摘要 |
PROBLEM TO BE SOLVED: To prevent the sensitivity of a sensor from being lowered due to a parasitic capacitance in a dynamic quantity sensor such as a semiconductor accelerometer. SOLUTION: In a semiconductor accelerometer, a substrate 1 in which a thin film 32 for pasting, insulating films 33, 34 and a conductive thin film 35 are formed on a silicon substrate 30 is provided, a beam structure which is supported by an anchor part on the surface of the substrate 1 is provided (in the Figure, a beam 4 for the beam structure is shown), and a fixed electrode which is fixed to the surface of the substrate 1 by a second anchor part is provided. In this case, a potential fetch part 50 is formed so as to he fixed to the surface of the substrate 1 by a third anchor part 51. The potential fetch part 50 and the thin film 32 for pasting are connected electrically via the third anchor part 51, and the potential of the thin film 32 for pasting is fixed. |
