| 摘要 |
PROBLEM TO BE SOLVED: To hang a thin sheet-shaped work for appropriately carrying inside a drying room, minimizing dust generation in the upper part of the work for appropriate drying, and utilizing efficiently for miniaturization and the like of a device. SOLUTION: A drying device comprises a substrate supplying device 18 for holding a substrate 10 on a hanger 14 and sending the substrate to a drying room 12, a loading part 24 arranged in the drying room 12 wherein a plurality of hangers 14 are loaded in a row, a feeding device 22 provided with a feeding action part 26 for loading a plurality of hanger 14, moving upward, moving horizontally into the feeding direction, moving downward, and moving horizontally into a direction opposite to the feeding direction in that order, the hangers 14 and the substrate 10 sent into the drying room 12 by the feeding device 22 are separated, a substrate discharging device 30 for discharging the substrate 10, and a returning device 32 for returning the hangers 14 to the substrate supplying device 18. |
