| 摘要 |
PROBLEM TO BE SOLVED: To improve carrying efficiency by carrying from a standard device to a bath device or vice versa. SOLUTION: In a carrying control method, standby is made on standard treatment type IC-manufacturing treatment devices A1-A3 for treating a single lot in a previous process, until lots L1-L3 are configured in a batch assembly, after the treatment of the previous process is completed, the lots L1-L3 are carried to a batch-type IC-manufacturing treatment device B1 in a next process for treatment when batch assembly is made, batch assembly is made with the lot L3 within a batch assembly target range before being carried to the batch- type IC manufacturing treatment device B2 in the next process for treatment after batch assembly wait time passes, when the number of lots of batch assembly is not sufficient. |
