| 摘要 |
PROBLEM TO BE SOLVED: To extend the number of durable years of a substrate-retaining tool and to improve the maintenance property by automating the setting of the position and the height of a substrate-receiving/transferring plate for a substrate-retaining groove and hence simplifying an operation for transferring the substrate, and at the same time rapidly and surely detecting the form change of the substrate-retaining tool. SOLUTION: In a substrate-carrying method, a substrate is transferred by a substrate- retaining tool 13 with a substrate-retaining groove 19 for retaining a substrate 9 in multiple stages. In this case, a position detection sensor 32 for sending and receiving a detection medium in a horizontal direction is provided at the lower part of a substrate-receiving/transferring plate 26 for receiving and transferring the substrate, the substrate-retaining groove position at a lower stage than the substrate-retaining groove where a substrate-receiving/transferring plate is inserted is calculated according to a signal from a position detection sensor, while the substrate-receiving/transferring plate drops from a position where it is inserted into the substrate-retaining groove, and the substrate is transferred based on the calculated result, thus simplifying the transfer operation of the substrate to the substrate-retaining tool. |
