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发明名称
APPARATUS FOR EVALUATING CHARACTERISTIC OF FERROELECTRIC BODY
摘要
申请公布号
JPH11295370(A)
申请公布日期
1999.10.29
申请号
JP19980120014
申请日期
1998.04.13
申请人
RICOH CO LTD
发明人
KAWASAKI TOSHIYUKI
分类号
G01R29/22;G01R31/00;H01L21/66;H01L21/8246;H01L21/8247;H01L27/10;H01L27/105;H01L29/788;H01L29/792;(IPC1-7):G01R31/00;H01L21/824
主分类号
G01R29/22
代理机构
代理人
主权项
地址
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