TRANSFER METHOD USING CHARGED PARTICLE BEAM,申请号JP19980120016-传众专利搜索

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发明名称	TRANSFER METHOD USING CHARGED PARTICLE BEAM
摘要
申请公布号	JPH11297619(A)	申请公布日期	1999.10.29
申请号	JP19980120016	申请日期	1998.04.14
申请人	NIKON CORP	发明人	SHIMIZU HIROYASU
分类号	G03F7/20;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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