| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a flow detecting element or a flow sensor, having a small dispersion of output values and excellent reliability. SOLUTION: In this flow detecting element or this flow sensor, an insulating support film 3 is formed on the surface of a plate base material 1, and plural thermosensitive resistors 6, 7 are arranged on the support film 3. And the thermosensitive resistors 6, 7 or the support film 3 is covered with an insulating protective film 4. Also the plate base material 1 is removed partially front the back side on the lower part of the region where the thermosensitive resistors 6, 7 are formed, to thereby form an opening 2, and hereby a diaphragm D is formed. Supposing the length in the shorter width direction of the diaphragm D is W and the deflection quantity of the diaphragm D is S, the S/W value is set as 1/50 or less, and hereby dispersion of output values is reduced and reliability of the flow detecting element or the flow sensor is improved.</p> |
