| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate position detection device for detecting a central position in a surface, with a simple configuration for alignment. SOLUTION: A substrate position detection device is provided with a substrate 1, a support arm 9, a motor 1b for advancing and retreating, and peripheral edge detection parts 17a-17d that carry a circular substrate W which is supported by the support arm 9 in an arc shape for the outer shape of the circular substrate W, are arranged so that the center of the above arc matches the central position of the circular substrate W when the center position matches a target transfer position, and detect the peripheral edge of the circular substrate W. Then, the deviation from the central position of the circular substrate W and the reference central position is obtained based on drive distance, when the peripheral edge detection parts 17a-17d detect a peripheral edge and the mounting position of the peripheral edge detection parts 17a-17d and the motor 1b for advancing and retreating and the substrate 1 are controlled, so that the deviation can be canceled for transfer. |
