| 摘要 |
PROBLEM TO BE SOLVED: To suppress the movement of a mover at power application. SOLUTION: In this method, an engaging plane is formed on the oppositely faced surfaces of a stator and a mover due to ultrasonic waves by application of first and second driving signals to piezoelectric transducers 5v, 6v, and values corresponding to the relative positions of the stator 5 and the mover 6 are stored. The initial movement of the mover 6 at power application can be suppressed by adjusting the time of starting application of the first and second drive signals to the piezoelectric transducers 5v, 6v in accordance with the stored values so that the positions of the crests and troughs of their ultrasonic engaging planes coincide with each other. |
