| 摘要 |
PROBLEM TO BE SOLVED: To reduce the weight of a device by composing a transmission passage in a container, in such a structure that two coaxial lines of different diameters are connected to each other by a radial line in plasma-processing utilizing high frequency power of 30-300 MHz. SOLUTION: A cathode electrode 54 comprises a large diameter part 56 and a thin and long small diameter part 58, and an upper end surface of the large diameter part 56 faces a plasma generating space 76. On an upper end surface of the large diameter part 56, a subject substrate 66 to be processed is placed. A lower end of the small diameter part 58 is connected via a matching circuit 60 to a high frequency power source 62. A transmission passage in a container comprises a large diameter coaxial line, a small diameter coaxial line, and a radial line connecting these to each other. The large diameter coaxial line is constituted of a large diameter part 56, a first sidewall 42, and an insulation 70. The radial line is composed of a lower surface of the large diameter part 56, an upper surface of a bottom plate 46, and a gap 72. The small diameter coaxial line is composed of a small diameter part 58, a second sidewall 68, and a gap 74. Proper impedance matching is taken between each coaxial line and the radial line. |
