| 摘要 |
<p>An electrode (25) for measuring dynamic pressure faces through a gap toward a first boss (9) provided on a first diaphragm (8). Since a change in dynamic pressure causes the first diaphragm (8) and the first boss (9) to be displaced, the change in dynamic pressure is indicated by the change in capacitance of a capacitor composed of the electrode (25) for measuring dynamic pressure and the first boss (9) while the change in differential pressure is indicated by the change in capacitance of a capacitor composed of a second electrode (26) for measuring difference pressure and a second boss (16). A temperature sensor (3) using a resistor is also provided. As a result, the dynamic pressure, difference pressure and temperature of a fluid are all detected in one place.</p> |
