| 发明名称 |
Capacitative sensor for pressure determination by deformation of a membrane causing a change in capacitance |
| 摘要 |
Capacitative sensor comprising two electrodes (3,4) with at least one of the sensors (3) having an arrangement of electrode strips (8) or matrix of electrode elements. Such an arrangement allows a spatial variation of the capacitance.
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| 申请公布号 |
DE19847563(A1) |
申请公布日期 |
1999.10.28 |
| 申请号 |
DE19981047563 |
申请日期 |
1998.10.15 |
| 申请人 |
MICRONAS INTERMETALL GMBH |
发明人 |
IGEL, GUENTER;SIEBEN, ULRICH;GIEHL, JUERGEN |
| 分类号 |
G01L9/12;G01L9/00;H01L29/84;(IPC1-7):G01D5/24;H01L49/00 |
主分类号 |
G01L9/12 |
| 代理机构 |
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代理人 |
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