| 摘要 |
<p>A method of producing a light modulation device in which no irregular reflection occurs. The method comprises the step (a) of forming a separation layer where separation occurs upon irradiation with light on a heat-resistant substrate, the step (b) of forming a piezoelectric layer on the separation layer, the step (d) of forming an electrode pattern on the piezoelectric layer and forming a mirror element in each of the pixels, the step (e) of electrically connecting an active element substrate on which active elements are provided in the respective pixels to the piezoelectric layer in such a way that the active elements correspond to the mirror elements, and the step (g) of causing separation in the separation layer by irradiating the separation layer with light from the heat-resistant substrate side.</p> |
