申请人 |
ULTRACLEAN TECHNOLOGY RESEARCH INSTITUTE, CO., LTD.;OHMI, TADAHIRO;KOTANI, KOJI;NAKADA, AKIRA;IMAI, MAKOTO;KONDA, MASAHIRO;MORIMOTO, TATSUO;YONEZAWA, TAKEMI;NOZAWA, TOSHIYUKI;NAKAYAMA, TAKAHIRO;FUJIBAYASHI, MASANORI;NITTA, TAKAHISA |
发明人 |
OHMI, TADAHIRO;KOTANI, KOJI;NAKADA, AKIRA;IMAI, MAKOTO;KONDA, MASAHIRO;MORIMOTO, TATSUO;YONEZAWA, TAKEMI;NOZAWA, TOSHIYUKI;NAKAYAMA, TAKAHIRO;FUJIBAYASHI, MASANORI;NITTA, TAKAHISA |