| 摘要 |
<p>A low-cost position sensor having a high resolution. The light emitted from a light source (1) is reflected by a moving part (70, 71), passed through a first slit (3, 31, 32) and through a second slit (20, 20-1, 20-2) in a fixed part (13, 130, 131) to produce moire stripes based on which the position of the moving part (70, 71) is determined. The slit length is reduced and the detector can be produced at a low cost.</p> |
