Laser beam deflection method, e.g. for laser machining

摘要

The method involves using a focusing lens (3), to provide a parallel laser beam (1). A deflection system (4) has a pair of rotary wedge plates (7,8) rotated at a set angular velocity about the lens optical axis (2), to deflect the beam at an angle to the lens optical axis. The machined object surface is in the lens focal plane. The angular velocities of the wedge plates are varied individually to deflect the beam in a circle or ellipse.