发明名称 |
METHOD AND APPARATUS USING ORGANIC VAPOR PHASE DEPOSITION FOR THE GROWTH OF ORGANIC THIN FILMS WITH LARGE OPTICAL NON-LINEARITIES |
摘要 |
In a method using organic vapor phase deposition (OCPD), for the growth of thin films of optically nonlinear organic salts, a volatile precursor of each component of the salt is carried as a vapor to a hot-wall reaction chamber by independently controlled streams of carrier gas. The components react to form a polycrystalline thin film on substrates of glass and gold. Excess reactants and reaction products are purged from the system by the carrier gas. For example, the method provides the growth of polycrystalline, optically nonlinear thin films of 4'-dimethylamino-N-methyl-4-stilbazolium tosylate (DAST) with >95% purity. |
申请公布号 |
EP0828867(A4) |
申请公布日期 |
1999.10.27 |
申请号 |
EP19960916459 |
申请日期 |
1996.05.13 |
申请人 |
THE TRUSTEES OF PRINCETON UNIVERSITY |
发明人 |
FORREST, STEPHEN R.;BAN, VLADIMIR S.;BURROWS, PAUL E.;SCHWARTZ, JEFFREY |
分类号 |
C30B25/14;C23C16/30;C30B25/02;C30B29/54;G02B6/12;G02B6/13;G02F1/35;G02F1/355;G02F1/361 |
主分类号 |
C30B25/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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