Plasma removal of unwanted material,申请号US19890404938-传众专利搜索

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发明名称	Plasma removal of unwanted material
摘要
申请公布号	US4975146(A)	申请公布日期	1990.12.04
申请号	US19890404938	申请日期	1989.09.08
申请人	MOTOROLA INC.	发明人	KNAPP, JAMES H.;CARNEY, GEORGE F.;CARNEY, FRANCIS J.
分类号	C01B7/01;B01J19/08;C23F4/00;C23G5/00;H01L21/302;H01L21/3065	主分类号	C01B7/01
代理机构		代理人
主权项
地址

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