| 发明名称 |
An anti-corrosion ceramic member |
| 摘要 |
<p>An anti-corrosion ceramic member having a substrate made of a ceramic material, a surface layer made of a fluoride and formed on the substrate, and an intermediate layer formed between the substrate and the surface layer and having the ceramic material of the substrate and the fluoride.</p> |
| 申请公布号 |
EP0952128(A1) |
申请公布日期 |
1999.10.27 |
| 申请号 |
EP19990303046 |
申请日期 |
1999.04.20 |
| 申请人 |
NGK INSULATORS, LTD. |
发明人 |
AIHARA, YASUFUMI;WATANABE, KEIICHIRO;KAWASAKI, SHINJI;NARUKAWA, AKIRA |
| 分类号 |
C04B41/87;C04B41/50;C04B41/85;C04B41/89;C23C16/458;H01L21/205;H01L21/302;H01L21/3065;H01L21/683;(IPC1-7):C04B41/89 |
主分类号 |
C04B41/87 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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