Method of fabricating multilayer structures with nonplanar surfaces

摘要

A method of fabricating a plurality of multilayer structures which includes at least one recess defined by a nonplanar surface. The method including the steps of: (a) providing a resilient, compliant material on over one or more stacks of layers including the area over the recess; (b) applying sufficient pressure to the stacks to cause the resilient, compliant material to fill the recess and laminate said stacks; (c) lifting the resilient, compliant material off the stack subsequent to the application of pressure; (d) providing one or more stacks of layers that have not been subjected to step (b); and (e) repeating steps (a)-(d). In a preferred embodiment of the invention steps (a)-(d) are repeated at least ten times without the need to change the resilient compliant material. In a most preferred embodiment of the invention steps (a)-(d) are repeated at least one hundred times.