发明名称 Linear motor apparatus, and stage apparatus, exposure system and device production method using the linear motor apparatus
摘要 A linear motor apparatus includes a mover, a stator, a detector, and a driver. The mover is adapted to be shifted along a shifting direction, and has a predetermined magnetic flux distribution. The stator has a plurality of coils aligned along the shifting direction of the mover. The detector detects the relative position of the mover with respect to the stator. The driver excites two or more coils simultaneously based on a predetermined target value and the output of the detector.
申请公布号 US5973459(A) 申请公布日期 1999.10.26
申请号 US19960665498 申请日期 1996.06.18
申请人 CANON KABUSHIKI KAISHA 发明人 ITOH, HIROSHI
分类号 B23Q5/28;B60L15/00;B65G54/02;H01L21/677;H01L21/68;H02K41/03;H02P25/06;(IPC1-7):H02K41/00 主分类号 B23Q5/28
代理机构 代理人
主权项
地址