| 摘要 |
PROBLEM TO BE SOLVED: To provide a lapping machine which can facilitate adjustment of pressuring force and attain uniform pressurization and lapping work suited to various purposes with only one lapping machine. SOLUTION: This lapping machine includes a pressurizing device consisting of a pressurizing shaft 76 pressurizing an upper surface plate 11 and a pressurizing cylinder 77 driving the pressurizing shaft 76, a supporting base 79 supporting the pressurizing cylinder 77, a moving means moving the supporting base 79 in a workpiece direction, a linear scale 40 measuring the traveling distance of the pressurizing shaft 76, and a controller controlling the pressurizing device and the moving device. A spherical bearing is provided at a jointing part of the pressurizing shaft 76 to the upper surface plate 11 so that the upper surface plate 11 may be rotatable in any direction, and a means for fixing the rotation is provided. |
