发明名称 |
Micromirror for a hybrid optoelectronic integrated circuit, a method for manufacturing the same, a micromirror-photodetector assembly and an assembly of hybrid optoelectronic integrated circuit for receiving light |
摘要 |
Disclosed is a micromirror for a hybrid optoelectronic integrated circuit, a method for manufacturing the same, a micromirror-photodetector assembly and an assembly of hybrid optoelectronic integrated circuit for receiving light. The micromirror the present invention comprises a silicon substrate and at least one V-shaped groove formed in the silicon substrate and the V-shaped groove has an inclined surface reflecting light emitted from an optical waveguide to a photodetector. The alignment of the photodetector and the optical fibers is achieved without an additional attachment equipment, by inserting the optical fibers into the V-groove.
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申请公布号 |
US5972232(A) |
申请公布日期 |
1999.10.26 |
申请号 |
US19970984148 |
申请日期 |
1997.12.03 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE;KOREA TELECOM |
发明人 |
LEE, SANG HWAN;HWANG, NAM;SONG, MIN KYU;LEE, HEE TAE;PYUN, KWANG EUI |
分类号 |
G02B6/12;G02B6/122;G02B6/42;(IPC1-7):H01L21/00 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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