| 摘要 |
PROBLEM TO BE SOLVED: To produce the member for an ultraprecision equipment excellent in thermal shape stability and rigidity. SOLUTION: Alloy steel having a componental compsn. contg., by weight, <=0.1% C, 0.1 to 0.4% Si, 0.15 to 0.4% Mn, >2 to 4% Ti, <=1% Al, 30.7 to 43.0% Ni and <=14% Co, in which Ni and Co also satisfy the inequality of 37.7<=Ni+0.8×Co<=43, and the balance Fe with inevitable impurities, in which the thermal expansion coefficient in the temp. range of -40 to 100 deg.C is regulated to <=4×10<-6> / deg.C, and the Young's modulus is regulated to >=16,100 kgf/mm<2> is used to produce a member. The alloy steel is moreover incorporated with one or >= two kinds of components selected from the group of V, W, Nb and Mo by <=1% in total and/or is incorporated with one or >= two kinds of components selected from the group of S, Pb, Ca and Se by <=0.5% in total.
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