| 摘要 |
The invention includes an XYZ stage 100 for positioning an object 140 in an X direction, a Y direction orthogonal to said X direction, and a Z direction orthogonal to both said X and Y directions. The stage 100 comprises a generally horizontal movable stage 104, a stationary X motor connected to said movable stage 104 for moving said stage in an X direction, a stationary Y motor 106 movably connected to said movable stage 104 for moving the stage 102 in a Y direction independently of the X direction, wherein the stage 100 has an L shaped bell crank 132 having an outside corner pivotally mounted on the stage 104 so that the bell crank 132 is rotatable in a vertical plane through the stage about an axis in the X direction, and a stationary Z axis motor connected to one end of the bell crank for movement of this one end in a Y direction. The other end of the bell crank thus moves in a Z direction. |
