BORON NITRIDE-ALUMINUM NITRIDE LAMINATE AND ITS USE

摘要

PROBLEM TO BE SOLVED: To obtain BN-AlN laminate having large-sized form and large corrosion resistance to fluorine-based plasma gas and provide a jig using the laminate. SOLUTION: In this BN-AlN laminate, an intermediate layer between boron nitride-based ceramics and aluminum nitride-based ceramics is a porous body of baron nitride-based sintered compact and/or a porous body of aluminum nitride-based sintered compact or the intermediate layer comprises a micro disperse structure baked from a mixture containing boron nitride powder and aluminum nitride powder, and boron nitride concentration is gradually decreased from boron nitride-based ceramic side toward aluminum nitride-based ceramic side. This jig is composed of the BN-AlN laminate.