| 摘要 |
<p>PROBLEM TO BE SOLVED: To smoothly separate a wafer from a wafer line by preventing the wafer from falling sideways. SOLUTION: A wafer line Wa is supported on support tubes 1 of support shafts 2, 3 and 4 by placing a fixing member onto receiving seats, the wafer line Wa is locked by moving a locking shaft 10 to the locking position A, and the fixing member 5 is removed from the wafer line Wa. One endmost wafer W is sucked by suckers 29 and moved horizontally leftward as shown in Fig. Therefore, the wafer W climbs over the support tube 1 of the support shaft 2, turned by taking the tube 1 as a support point so as to be twisted, and forcibly extracted from between the support tube 1 of the support shaft 2 and a locking tube 9. The twist rotation of the wafer W facilities the separation of the wafer W from the wafer line Wa. Since the wafer is transported in a state where the fixing member faces upward, it can be prevented from falling sideways.</p> |
