发明名称 LIQUID PHASE GROWTH OF SILICON CRYSTAL, PRODUCTION OF SOLAR CELL AND LIQUID PHASE GROWTH DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for silicon crystal liquid phase growth capable of continuous crystal growth in high mass productivity, and to provide a method for solar cell production using the resultant silicon crystal. SOLUTION: This method for silicon crystal liquid phase growth comprises the following procedure: a stock gas containing at least silicon atoms is blown into a solvent 104 to decompose the stock gas along with dissolving the silicon atoms in the solvent to feed it with the silicon atoms, and a substrate 102 is subsequently immersed in or contacted with the solvent to effect growth of the aimed silicon crystal on the substrate. The 2nd objective liquid phase growth device for silicon crystal has a means 106 for blowing a stock gas containing at least silicon atoms into a solvent.
申请公布号 JPH11292693(A) 申请公布日期 1999.10.26
申请号 JP19980347029 申请日期 1998.12.07
申请人 CANON INC 发明人 NISHIDA AKIYUKI;NAKAGAWA KATSUMI;IWANE MASAAKI;UKIYO NORITAKA
分类号 H01L31/04;C30B29/06;H01L21/208 主分类号 H01L31/04
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