发明名称 |
Removable passivating polyimide coating and methods of use |
摘要 |
Disclosed is the use of a removable passivating layer in multichip packaging and CUBE applications. The process takes advantage of the fact that various metal ions will react with the carboxylic acid groups of various polyimide precursors. The polyimide will cure at a first temperature and the system may be manipulated and tested. At a later point, the polyimide is subjected to a second, higher temperature in order to decompose or completely destroy the polyimide. |
申请公布号 |
US5972145(A) |
申请公布日期 |
1999.10.26 |
申请号 |
US19960660567 |
申请日期 |
1996.06.07 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
HOLMES, STEVEN JOHN;LINDE, HAROLD GEORGE |
分类号 |
H01L21/66;H01L21/68;H01L23/498;(IPC1-7):B32B31/00 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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