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发明名称
摘要
申请公布号
JP2967126(B2)
申请公布日期
1999.10.25
申请号
JP19900236214
申请日期
1990.09.05
申请人
SEIKOO INSUTSURUMENTSU KK
发明人
KAMYA MASAAKI;TAKASU HIROAKI;KOJIMA YOSHIKAZU;YAMAZAKI TSUNEO;SUZUKI HIROSHI;TAGUCHI MASAAKI
分类号
G02F1/1345;G02F1/136;G02F1/1368;H01L27/12;H01L29/78;H01L29/786;(IPC1-7):G02F1/136;G02F1/134
主分类号
G02F1/1345
代理机构
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