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发明名称
摘要
申请公布号
JP2966414(B2)
申请公布日期
1999.10.25
申请号
JP19880025258
申请日期
1988.02.05
申请人
SONII KK
发明人
SUMI HIROBUMI;NISHIHARA TOSHUKI
分类号
H01L21/3205;H01L21/768;H01L23/52;(IPC1-7):H01L21/768;H01L21/320
主分类号
H01L21/3205
代理机构
代理人
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地址
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