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发明名称
摘要
申请公布号	JP2967974(B2)	申请公布日期	1999.10.25
申请号	JP19960327417	申请日期	1996.12.09
申请人	NIKON KK	发明人	UMADATE TOSHIKAZU
分类号	G03F7/20;G03F9/00;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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