| 摘要 |
A treatment chamber comprising an inlet port (2) through which helium gas is introduced into a space, an outlet port (1) through which the air replaced with the helium gas from the upper part of the space as the helium gas is introduced thereinto is exhausted, and a treatment space provided in the space and containing a helium gas atmosphere. With this constitution, a material which is easily influenced by the air can be stored and manufactured easily and safely without the influence of the air. Further, a work which produces a large quantity of dust and a work which is not suitable to be worked in the presence of dust can be performed with an improved working efficiency. |
