发明名称 Guard structure for bipolar semiconductor device
摘要 A guard ring structure formed around the periphery of a bipolar semiconductor device. A guard region (11) is formed in a substrate (1) of the device so as to extend adjacent a peripheral portion of the device. An insulating layer (3) is formed on the substrate between the peripheral portion of the device and the guard region (11). A polysilicon layer (13) is formed on the insulating layer (3) and covered with a layer of densified dielectic (14). Electrical interconnections are provided between the polysilicon layer (13) and the guard region (11) at spaced apart portions of the device where the guard structure does not need to be protected by the densified dielectric.
申请公布号 AU3155599(A) 申请公布日期 1999.10.25
申请号 AU19990031555 申请日期 1999.04.01
申请人 ZETEX PLC 发明人 DAVID CASEY
分类号 H01L21/285;H01L21/768;H01L29/06;H01L29/40;H01L29/78 主分类号 H01L21/285
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