| 摘要 |
<p>PURPOSE:To prevent the generation of defects by disconnection without increasing the number of stages and to lower wiring resistance. CONSTITUTION:A 1st wiring electrode 16 consisting of Ta, a lower metal 4 of a nonlinear resistance element 3, a drawing out electrode 5, and an electrode terminal 6 are formed on a glass substrate 1. A 2nd wiring electrode 17 slightly narrower than this 1st wiring electrode 16 and a protective pattern 18 are formed of a transparent conductive film consisting of ITO on the surfaces of a picture element display electrode 12 and the 1st wiring electrode 16. An oxide film 8 consisting of Ta2O5 is formed on the surface of the lower metal 4. Cr is formed as the upper metal of the nonlinear resistance element 3. An upper metal and a 3rd wiring electrode 23 are formed on the oxide film 8. A wiring electrode 2 having a metal-ITO(Indium Tin Oxide)-metal structure is formed of the 1st, 2nd and 3rd wiring electrodes 16, 17, 23.</p> |
